Structural design and performance research of vibration sensor based on liquid metal-based triboelectric nanogenerators

PDF(12974 KB)

Journal of Dalian Maritime University ›› 2026, Vol. 52 ›› Issue (1) : 79-86.

LU Xu，ZOU Yongjiu^∗，ZENG Yudi，ZHOU Changmin，JING Yihang，XU Minyi

Author information +

History +

Abstract

In modern industrial systems, mechanical vibration monitoring technology plays a crucial role in ensuring equipment safety and preventing failures. This study proposes a highly sensitive liquid metal-based vibration sensor based on a triboelectric nanogenerator (TENG) for real-time vibration monitoring of marine mechanical equipment. The sensor consists of conductive fabric, Fluorinated Ethylene Propylene (FEP) film, and liquid metal, utilizing the triboelectric effect to convert mechanical vibrations into electrical signals. Experimental verification shows that this sensor exhibits excellent linear voltage response (R 2=0.995) within the dynamic acceleration range of 5 to 50 m/s², with a sensitivity of 0.218 V·m⁻¹·s². It also has good durability, and the signal attenuation can be ignored after 21,600 acceleration fatigue tests. It was ultimately successfully applied to the vibration monitoring of ship air compressors. Compared to traditional piezoelectric and electromagnetic sensors, this technology offers advantages such as high sensitivity, electromagnetic interference resistance, and flexibility to adapt to harsh environments, providing a novel solution for condition monitoring of equipment in demanding operational scenarios such as marine applications.

Key words

vibration sensor / triboelectric nanogenerators / liquid metal / mechanical vibration detection

Cite this article

EndNote

Ris (Procite)

Bibtex

Download Citations

LU Xu, ZOU Yongjiu, ZENG Yudi, ZHOU Changmin, JING Yihang, XU Minyi. Structural design and performance research of vibration sensor based on liquid metal-based triboelectric nanogenerators[J]. Journal of Dalian Maritime University. 2026, 52(1): 79-86

References

[1]FANG L, ZHENG Q W, HOU W C, et al. A self-powered vibration sensor based on the coupling of triboelectric nanogenerator and electromagnetic generator[J]. Nano Energy, 2022, 97: 107164.

[2]TAMA B A, VANIA M, LEE S, et al. Recent advances in the application of deep learning for fault diagnosis of rotating machinery using vibration signals[J]. Artificial Intelligence Review, 2023, 56(5): 4667-4709.

[3]BHATTA T, PRADHAN G B, SHRESTHA K, et al. All elastomeric pillars-based triboelectric vibration sensor for self-powered broad range machinery condition monitoring[J]. Nano Energy, 2023, 117: 108929.

[4]LONG Z H, LIN W K, LI P Y, et al. One-wire reconfigurable and damage-tolerant sensor matrix inspired by the auditory tonotopy[J]. Science Advances, 2023, 9(48): 11.

[5]李光正, 王涛, 张国勇. 基于物联网体系的智能船舶设计[J].船舶工程, 2012, 34(6): 59-62.

LI G Z, WANG T, ZHANG G Y. Study of intelligent ship design based on internet of things[J]. Ship Engineering, 2012, 34(6): 59-62.(in Chinese)

[6]HAN H W, LUO J C, GAO L X, et al. A wideband vibration sensor with piecewise nonlinear and up-frequency coupling strategy for mechanical fault monitoring[J]. Nano Energy, 2024, 129: 110040.

[7]GAWDE S, PATIL S, KUMAR S, et al. A scoping review on multi-fault diagnosis of industrial rotating machines using multi-sensor data fusion[J]. Artificial Intelligence Review, 2023, 56(5): 4711-4764.

[8]ZOU Y J, ZENG Y D, LU X, et al. Highly Sensitive CNT-Sponge triboelectric vibration sensor for machinery monitoring[J]. Advanced Materials Technologies, 2025, 10(16): 10.

[9]ZHOU T T, WANG S L, AO Y, et al. High-temperature-resistance flexible piezoelectric sensor via cyclized PAN/ BTO nanofibers[J]. Nano Energy, 2025, 138: 110910.

[10]YIN H, LI Y T, TIAN Z Y, et al. Ultra-high sensitivity anisotropic piezoelectric sensors for structural health monitoring and robotic perception[J]. Nano-Micro Letters, 2025, 17(1): 42.

[11]FENG B, JIN H, FANG Z J, et al. Flexible strain sensor based on ultra-thin quartz plate[J]. IEEE Sensors Journal, 2021, 21(17): 18571-18577.

[12]DU T L, DONG F Y, XI Z Y, et al. Recent advances in mechanical vibration energy harvesters based on triboelectric nanogenerators[J]. Small, 2023, 19(22): 27.

[13]徐新, 石岳功, 徐敏义,等. 基于固液摩擦纳米发电机的法兰泄漏监测技术[J].大连海事大学学报, 2023, 49(3): 114-121.

XU X, SHI Y G, XU M Y, et al. Pipeline flange leakage monitoring technology based on solid-liquid triboelectric nanogenerator[J]. Journal of Dalian Maritime University, 2023, 49(3): 114-121.(in Chinese)

[14]WANG Z L. Triboelectric nanogenerator (TENG)-sparking an energy and sensor revolution[J]. Advanced Energy Materials, 2020, 10(17): 2000137.

[15]DU T L, SHEN D L, XI Z Y, et al. Highly adaptive and broadband triboelectric energy harvester with stretching silicone rubber strip for variable harmonic frequency vibration[J]. Nano Research, 2024, 17(5): 4089-4099.

[16]ZOU Y J, SUN M Z, XU W P, et al. Advances in marine self-Powered vibration sensor based on triboelectric nanogenerator[J]. Journal of Marine Science and Engineering, 2022, 10(10): 1348.

[17]DU T L, ZUO X S, DONG F Y, et al. A self-powered and highly accurate vibration sensor based on bouncing-ball triboelectric nanogenerator for intelligent ship machinery monitoring[J]. Micromachines, 2021, 12(2): 218.

[18]GUO Z H, GAO X H, LU J S, et al. Recent advances for liquid metals: synthesis, modification and bio-applications[J]. Journal of Materials Science & Technology, 2023, 143: 153-168.

[19]ZHAN F, LI P L, FU J H, et al. Liquid metal-based angle detection sensor[J]. ACS Applied Electronic Materials, 2023, 5(7): 3571-3578.

[20]RAHMAN M S, HUDDY J E, HAMLIN A B, et al. Broadband mechanoresponsive liquid metal sensors[J]. Npj Flexible Electronics, 2022, 6(1): 71.

[21]QIN J H, CUI D D, REN L, et al. Emerging advances of liquid metal toward flexible sensors[J]. Advanced Materials Technologies, 2024, 9(14): 2300431.

[22]CHENG T H, SHAO J J, WANG Z L. Triboelectric nanogenerators[J]. Nature Reviews Methods Primers, 2023, 3(1): 39.

[23]YI P S, THURGOOD P, NGUYEN N, et al. Oscillation and self-propulsion of Leidenfrost droplets enclosed in cylindrical cavities[J]. Soft Matter, 2020, 16(38): 8854-8860.