针对液压系统流量的动态测量，结合现有实验设备和基于微机电系统（MEMS）的新型流量传感器，通过DASYLab虚拟仪器开发软件开发出相应的动态流量测试系统.实验证实，基于MEMS的新型流量传感器能够检测频率高于200 Hz的流量脉动，具有较好的频率响应特性.开发的动态流量测试系统能够很好地满足实验要求，为优化新型流量传感器的设计提供了理想平台.
Abstract
According to the dynamic flow measurement in hydraulic system, the paper develops the dynamic flow test system with the virtual instrumentation software of DASYLab combining with the experimental equipment and the new flow sensor based on micro-electro-mechanical systems（MEMS）. Experiments confirm that the new flow sensor can detect the flow pulse frequency beyond 200Hz, which shows its better frequency response. At the same time, the dynamic flow test system can meet the requirements of the experiment, which provides an ideal platform to optimize the design of the new flow sensor.
关键词
液压系统 /
动态测量 /
微机电系统（MEMS） /
DASYLab /
虚拟仪器 /
频率响应
Key words
hydraulic system /
dynamic measurement /
micro-electro-mechanical systems （MEMS） /
DASYLab /
virtual instrumentation /
frequency response
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基金
国家自然科学基金资助项目(51205034)； 辽宁省教育厅科学研究项目(L2012179).
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