针对传统直流离子渗氮中存在的问题，采用空心阴极放电渗氮化对低合金钢进行表面改性处理.结果表明: 含氮气体经过空心阴极放电电离可提供高浓度的氮离子、氮原子等活性物质，在低合金钢表面形成高硬度的氮化层, 同时，避免了传统辉光放电氮化技术中存在的边缘效应等问题.
Abstract
To overcome the common problems associated with the conventional DC plasma nitriding, this paper presented technology of plasma nitriding with hollow cathode discharge. The nitriding of low alloy steel was carried out at cathode potential in a space enclosed by an active screen which consisted of two cylinders with different diameter. Results indicate that the plasma formed on the bilayer active screen, which contains a mixture of ions, electrons and other active nitriding species. The low alloy steel is effectively nitrided in the plasma atmosphere enclosed by bilayer active screen. Meanwhile the edge effect associated with conventional plasma nitriding can be completely avoided.
关键词
低合金钢 /
离子渗氮 /
空心阴极放电
Key words
low alloy steel /
plasma nitriding /
hollow cathode discharge
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参考文献
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基金
国家自然科学基金(51179017)；国家自然科学基金(51301149)
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