设计一种基于电感检测原理实现金属颗粒区分检测的微流体计数芯片.应用电磁学理论对检测机理进行研究, 得出该芯片输出信号与颗粒几何特性以及芯片几何特性的关系式, 并用该关系式对该芯片的精度进行详细分析.对100 μm铁质颗粒以及150 μm铜颗粒在不同流动状态下电感峰值变化量与数值计算进行验证对比.结果表明，曲线符合度良好.该方式对颗粒检测以及区分可行并验证该理论基本正确， 为进一步开发高精度微流体油液检测芯片提供了理论支持.
Abstract
This paper described a microfluidic counting chip which can realize the metal debris detection based on the principle of inductance detection. Electromagnetic theory was used to study the detection mechanism, the relationship between output signal of chip and particle geometric characteristics, and the chip geometric characteristics were known. Then a detailed analysis was conducted to the chip accuracy using the relationship. The experiments confirmed the curves fit well by comparing peak change in inductance and numerical calculation under different flow conditions of 100 μm iron particles and 150 μm copper particles. The proposed method for particles detection and discrimination is feasible, which can provide theoretical support for the further development of high precision microfluidic oil detection chip.
关键词
微流体芯片 /
金属颗粒检测 /
平面电感
Key words
microfluidic chip /
metal debris detection /
planar spiral inductors
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基金
国家自然科学基金资助项目(51205034, 51109021)；辽宁省教育厅科学研究项目(L2012179)； 交通运输部科技项目(2013329225260)
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